Travel range: 76 X 25 mm2 (200 X 200 mm2 as required)
Repeatability < 1 um
Accuracy +/- 3 um
X, Y scan resolution: 0.05 um
1. XY motorized stage with the smallest 50 nm step size in XY direction controlled by software.
2. Z motorized stage with the smallest 2 nm step size in Z direction controlled by joystick or software. (as required)| Company Name : | ProTrusTech Co., Ltd. |
|---|---|
| Contact Person : | Mr. Huang  |
| Address : | 3F.-1, No. 293, Sec. 3, Dongmen Rd. |
| City : | East Dist., Tainan City |
| Province / State : | Tainan City |
| Country : |  Taiwan |
| Website : | http://en.protrustech.com/ |
| Telephone : | 886-6-2892081 |
| Fax : | 886-6-2890862 |
